Hybrid physical–chemical vapor deposition of Bi2Se3 films
نویسندگان
چکیده
منابع مشابه
Initiated Chemical Vapor Deposition of Functional Polyacrylic Thin Films
Initiated chemical vapor deposition (iCVD) was explored as a novel method for synthesis of functional polyacrylic thin films. The process introduces a peroxide initiator, which can be decomposed at low temperatures (<2000 C) and initialize addition reaction of monomer species. The use of low temperatures limits the decomposition chemistry to the bond scission of initiator, while retaining funct...
متن کاملChemical vapor deposition of HfO2 films on Si„100..
HfO2 films were grown on Si~100! by chemical vapor deposition as an attempt to develop an industrially straightforward gate dielectric deposition process. During deposition at ;400 °C the decomposition of the hafnium-tetra-tert-butoxide Hf(C4H9O)4 precursor provides sufficient oxygen to produce a stoichiometric HfO2 film. Medium energy ion scattering, high resolution transmission electron micro...
متن کاملOxidative chemical vapor deposition of polyaniline thin films
Polyaniline (PANI) is synthesized via oxidative chemical vapor deposition (oCVD) using aniline as monomer and antimony pentachloride as oxidant. Microscopy and spectroscopy indicate that oCVD processing conditions influence the PANI film chemistry, oxidation, and doping level. Fourier transform infrared spectroscopy (FTIR), scanning electron microscopy (SEM), and X-ray photoelectron spectroscop...
متن کاملWafer scale homogeneous bilayer graphene films by chemical vapor deposition.
The discovery of electric field induced band gap opening in bilayer graphene opens a new door for making semiconducting graphene without aggressive size scaling or using expensive substrates. However, bilayer graphene samples have been limited to μm(2) size scale thus far, and synthesis of wafer scale bilayer graphene poses a tremendous challenge. Here we report homogeneous bilayer graphene fil...
متن کاملVapor deposition routes to conformal polymer thin films
Vapor phase syntheses, including parylene chemical vapor deposition (CVD) and initiated CVD, enable the deposition of conformal polymer thin films to benefit a diverse array of applications. This short review for nanotechnologists, including those new to vapor deposition methods, covers the basic theory in designing a conformal polymer film vapor deposition, sample preparation and imaging techn...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: Journal of Crystal Growth
سال: 2016
ISSN: 0022-0248
DOI: 10.1016/j.jcrysgro.2016.02.027